Benefits of WDS
By using SEM-WDS as opposed to an electron microprobe (EPMA) we are able to collect data at significantly lower probe currents, thereby reducing the interaction volume. This means that we can accurately analyse the composition of small features without contaminating the spectra with X-rays released from nearby features, as well as reducing damage to the sample from the electron beam. In addition, our SEM-WDS system stores standardisations for each set of best operating conditions and does not require standardising before each analysis, saving a large amount of time.