Focused Ion Beam

Focused Ion Beam is a column powered by liquid metal ion sources (LMIS) to provide a gallium ion beam
Focused Ion Beam

Introduction

Focused Ion Beam (FIB) is a setup similar to a scanning electron beam, but with a beam of ions instead. Currently, the most used is the gallium ion beam powered by liquid metal ion sources (LMIS). The FIB can be accelerated to 0.5-30 kV with current up to 100nA. 
The most important application of FIB is to mill into samples: the accelerated ions attack the sample surface, removing the atoms from the material with controlled dwell time and dose, taking a volume away from the sample revealing a section in depth which is ready to be imaged and analysed. Due to this nature, the removed material from the sample cannot be restored. Besides, gallium implants into the sample may occur during the milling process which should be made aware of in case of sensitive materials. With the milling capability of FIB, in-depth structures are exposed which cannot be seen from the top surface.
<p>Cross Section through an LED</p>
<p>Ion Beam Deposition</p>

Ion Beam Deposition

With the assistance of Gas Injection System, more functions can be achieved such as in-situ deposition for conductive pathway establishment and protection of the region of interest, gas-assisted enhanced etching on silicon-based semiconductor materials, and local charge compensation on non-conductive samples. 
The image on the right shows a layer of platinum that has been deposited on the sample, which will help protect the area underneath and reduce the curtaining effect during cross-section imaging and serial sectioning tomography acquisition. 

Ion Beam Imaging

 The gallium ion beam can be used to generate images in a way similar to SEM and offers great grain orientation contrast in crystalline materials, along with great atomic number contrast. 

The image on the right shows an ion beam image on a cross-section of an electroplated tin on brass sample, with an electron image as inset taken from exactly the same area.
<p>FIB imaging with inset electron imaging</p>
<p>FIB milling</p>

Available equipment

Relevant Case Studies

Are you interested in how PEMC have used the FIB for applications in research and industry? Check out our relevant case studies below!

ARC Marine Case Study ARC Marine Case Study
 Using FIB-SEM to analyse the colonisation of reef cubes with habitat building species

Composite Innovations Ltd Case Study Composite Innovations Ltd Case Study
 Identifying variations in composite microstructure using FIB-SEM

Esterlam International Ltd Case Study Esterlam International Ltd Case Study
 Using FIB-SEM to analyse performance consistency of PET blades

Enigma Audio Case Study Enigma Audio Case Study
 Materials analysis to investigate reasons for audio performance variations of speakers

Plessey Semiconductors Ltd Case Study Plessey Semiconductors Ltd Case Study
 Analysing micro-electronics using FIB-SEM

3D Reconstruction of Porous Materials using FIB-SEM 3D Reconstruction of Porous Materials using FIB-SEM
 An exploration of the porosity and its interconnectivity of materials using FIB-SEM

The Effect of Different Post-Electroplating Surface Modification Treatments on Tin Whisker Growth The Effect of Different Post-Electroplating Surface Modification Treatments on Tin Whisker Growth
 Studying out different oxide coatings effect tin whisker growth using FIB-SEM

Microscopic Study of (Assemblies of) Nano-objects Microscopic Study of (Assemblies of) Nano-objects
 Using FIB-SEM for 2D and 3D imaging of nanoparticles

3D Printing a Coccolithophore from FIB-SEM Data 3D Printing a Coccolithophore from FIB-SEM Data
 A case study showing how a single coccolithophore can be 3D printed