The JEOL IT510 SEM
Technical specification of this microscope is below: 
Resolution: 3.0 nm (@ 30 kV)
Magnification: 5 - 300,000x
Acceleration Voltage: 0.3 - 30 kV
Vacuum Mode: High vacuum, low vacuum/variable pressure
This SEM is equipped with: 
  • OI Xplore 30 mm2 EDX
  • JEOL Low Vacuum Secondary Electron Detector