Zeiss Sigma 300 LV FE SEM

Technical specification

Resolution: 1 nm (@ 15 kV)
Magnification: 10 - 1,000,000x
Acceleration Voltage: 0.02 - 30 kV
Vacuum Mode: High vacuum, low vacuum/variable pressure

Equipment specification

Built-in Detectors
  • SE2 - Secondary Electron Detector
  • InLens - Secondary Electron Detector within column
  • BSD - Backscatter Electron Detector (retractable)
  • Panchromatic Cathodoluminescence
  • LVSED - Low Vacuum Secondary Electron Detector
Analytical Detectors
  • 2 x OI Ultimax 65 mm2 EDX