Technical specification
Resolution: 1 nm (@ 15 kV)
Magnification: 10 - 1,000,000x
Acceleration Voltage: 0.02 - 30 kV
Vacuum Mode: High vacuum, low vacuum/variable pressure
Equipment specification
Built-in Detectors
- SE2 - Secondary Electron Detector
- InLens - Secondary Electron Detector within column
- BSD - Backscatter Electron Detector (retractable)
- Panchromatic Cathodoluminescence
- LVSED - Low Vacuum Secondary Electron Detector
Analytical Detectors
- 2 x OI Ultimax 65 mm2 EDX